MEMS LiDAR

MEMS LiDAR is a semi-solid-state LiDAR solution that replaces conventional mechanical spinning assemblies with Micro-Electro-Mechanical Systems (MEMS) micro-mirrors to steer laser beams. It is currently regarded as the mainstream option for automotive-grade mass production, striking an ideal balance between performance, cost, and reliability.

💡 Operating Principle: How Does It Eliminate "Mechanical Rotation"?

To understand MEMS LiDAR, picture a microscopic "mirror" in motion:

Core Component: At its heart lies a millimeter- or even micrometer-scale MEMS micro-mirror, capable of high-frequency deflection across both horizontal and vertical axes.
Scanning Mechanism: The laser transmitter fires light pulses at this micro-mirror, which deflects dynamically to alter the beam's trajectory, enabling two-dimensional scanning.
Imaging Principle: Photodetectors capture the reflected light signals and determine target distances by calculating the Time-of-Flight (ToF, the interval between pulse emission and reception), ultimately generating a 3D point cloud map.

Unlike legacy mechanical LiDAR units that require an unsightly "spinning dome" atop the roof, the MEMS design scans via microscopic mirrors, substantially cutting down on moving parts.

⚖️ Key Advantages: Why Has It Become Mainstream?

MEMS LiDAR has emerged as a front-runner among competing technologies primarily due to the following strengths:

Compact Packaging and Cost Efficiency: Dispensing with bulky drive motors and significantly reducing the required number of lasers and detectors (often down to a single array) allows for a vastly smaller form factor, slashing manufacturing costs by over 50%. Industry analyses project that unit costs could eventually fall well below RM650 (approx. RMB 1,000).
Easier Automotive-Grade Qualification: With minimal moving parts and micro-mirrors mass-produced via mature semiconductor processes, MEMS units deliver superior vibration/shock resistance and product consistency, meeting stringent automotive-grade standards far more readily.
Adaptive Scanning Modes: The MEMS mirror can dynamically adjust its scan pattern, boosting resolution and refresh rates across specific target areas—such as distant vehicles directly ahead—to deliver high-definition Region of Interest (ROI) perception.

⚠️ Key Limitations: Not Entirely Flawless

Nevertheless, MEMS technology still faces several engineering challenges that the industry is working to overcome:

Restricted Field of View: Constrained by the physical deflection angle of the micro-mirror, a single LiDAR sensor typically offers a Field of View (FoV) of around 120°, falling short of the 360° panoramic coverage of mechanical units and necessitating multi-sensor arrays.
Micro-Mirror Long-Term Reliability: As a moving mechanical element, the micro-mirror's long-term endurance under continuous high-frequency oscillation and severe thermal cycling remains an area requiring ongoing validation and refinement.
Point Cloud Uniformity: MEMS scanning delivers dense point clouds at the centre of its FoV while tapering off towards the fringes, demanding advanced algorithmic compensation.

🚗 Industry Landscape: Key Players and Applications

Today, this technology is already featured across numerous production models, serving as a staple sensing hardware in intelligent vehicle architectures.

Key Players: Globally, leading proponents of the MEMS route include RoboSense, Huawei, and Innoviz. For instance, RoboSense's RS-LiDAR-M1, widely recognised as the world's first automotive-grade MEMS LiDAR, has been deployed on production models including the XPeng G9 and Li Auto L9.
Technological Advancements: Chinese component makers are also stepping up their presence; Yingtang Intelligent Control has rolled out MEMS micro-mirrors leveraging electromagnetic drive and dual-axis independent control for commercial supply. Concurrently, pioneering firms such as Omnitron Sensors are enhancing mechanical robustness and service life by optimising the force density and aspect ratio of micro-mirror architectures.